Semiconductor Equipment

Semiconductor Process Equipment

Centrotherm thermal solutions GmbH & Co.KG High temperature annealing furnace "Activator150"
Vacuum Soldering System "VLO series"
High-temperature oxidation furnace "Oxidator150"
Vertical system for mass production "vericoo200"
Tani Electronics Corporation Printing for Wafer Bumping

Semiconductor Metrology Equipment

SENTECH Instruments GmbH Advanced Film Thickness Probe
Reflectometer for materials analysis
Laser ellipsometer for ultimate precision
Spectroscopic ellipsometer for largest spectral rangePhotovoltaics
Celadon Systems, Inc. High Temperatuer Probe Card
PVATePla [SIRD A300] (SIRD: Scanning InflaRed Depolarization)

Thermal Test Solution Equipment

inTEST Thermal Solutions Thermostream
Thermal Chamber
Thermal Platform
Thermospot
Process chiller

Sintering System for Power Device

Tani Electronics Corporation R&D system: Model HTM-1000
Standard system: Model HTM-3000
High Volume Production System: Model HTM-HV