Product lineup
・Refurbished Endura
Full chamber and system refurbishment available for various wafer sizes (100mm ~ 300mm) and various wafer types. All applications from Silicide, Barrier, Al, Cu, and customer specific applications & technologies can be provided by Semicat.
・New SURPASS PVD System
The new SURPASS200 PVD System has been designed and qualified for 200mm semiconductor production. The SURPASS200 allows for process transparency by integrating existing Endura® process chambers, including PVD, Sputter Etch, and Orient/Degas on to the new up-to-date system architecture. In addition, enhancements such as dual blade robots for front and back transfer chambers, automatic wafer positioning system, and new software are available. For customers, there is now another solution for capacity requirements without risking reliability, process, or productivity as compared to Endura mainframe. Semicat can provide both types of solutions, Refurbished PVD Endura® or New PVD SURPASS.
*Endura® is a registered trademark of Applied Materials.
Semicat, Inc. is the industry leader of refurbishment of PVD Endura/Centura systems. Semicat adhere to strict testing and BKM requirements of the Endura 200mm & 300mm platforms. Semicat’s goals are to maintain the highest standards and provide our customers with tailored services for the requirements needed.
Inquiry on the products
Reception hours: Weekdays 9:00-17:30
(excluding Saturdays, Sundays, holidays, and company-designated holidays)