Riber is the world's leading provider of molecular beam epitaxy (MBE) equipment, the most versatile and precise tool to deposit precise amounts of material onto substrates and which are used to design and create the newest semiconductor structures and manufacture many of these devices.
Product Lineup
CLS12
- Affordable academic MBE research tool
- Small footprint /small costs of use
- Capable of up to 2’’ substrates
- Up to 6 geometrically equivalent cell ports
- Low running costs, easy on–site maintenance
Compact21
- Capable of up to 3" wafer
- 12 geometrically equivalent cell ports
- Large bottom port for Electron beam unit, cells and instrumentation
- Manual or fully automated configuration
- Easily expandable to multi chamber configuration.
MBE412
- Capable of up to 4" or multi 2" wafer
- 12 geometrically equivalent cell ports
- Up to 8 Egun pockets
- Manual or fully automated configuration
- Easily expandable to multi chamber configuration.
MBE49
The Riber MBE 49 series of fully automated, silicon-style machines sets industry standards for material quality, yield, throughput, and costs associated with operation and maintenance.
Four reactors are available in the MBE 49 series, which are specifically designed for depositing arsenides, phosphides, nitrides and oxides. These industry-leading machines have a capacity of 4 x 4-inch wafers or 5 x 3-inch wafers and feature the capabilities for in-situ monitoring and pre-growth treatment.
MBE6000
The
Riber
MBE
6000
is
a
high-throughput,
fully
automated
silicon-style
machine
that
delivers
industry-leading
levels
of
reliability,
yield,
cost-effectiveness
and
reproducibility.
This
system,
which
has
a
capacity
of
9
x
4-inch
wafers
or
4
x
6-inch
wafers.
The
MBE
6000
has
13
source
ports,
a
suite
of
in-situ
characterization
tools
and
a
capability
to
load
up
to
ten
platens
at
one
time.
MBE7000
The
Riber
MBE
7000
is
the
world's
most
advanced
reactor.
This
silicon-style
machine
is
the
perfect
choice
for
high-volume,
cost-effective
and
reliable
manufacture
of
gallium
arsenide
HBTs
and
pHEMTs
wafers.
This
system,
which
has
a
capacity
of
14
x
4-inch
wafers
or
7
x
6-inch
wafers.
The
MBE
7000
has
13
source
ports,
a
suite
of
in-situ
characterization
tools
and
a
capability
to
load
up
to
ten
platens
at
one
time.
Evaporation source
More than any other component, effusion cells and sources play a key role in the quality of materials grown by MBE (i.e. morphology, purity, composition, uniformity, etc.). With over 11.000 effusion cells and sources in the field, Riber has the largest installed base.