RIBER / France

Details
RIBER

Riber is the world's leading provider of molecular beam epitaxy (MBE) equipment, the most versatile and precise tool to deposit precise amounts of material onto substrates and which are used to design and create the newest semiconductor structures and manufacture many of these devices.

Product Lineup

CLS12

  • Affordable academic MBE research tool
  • Small footprint /small costs of use
  • Capable of up to 2’’ substrates
  • Up to 6 geometrically equivalent cell ports
  • Low running costs, easy on–site maintenance

Compact21

  • Capable of up to 3" wafer
  • 12 geometrically equivalent cell ports
  • Large bottom port for Electron beam unit, cells and instrumentation
  • Manual or fully automated configuration
  • Easily expandable to multi chamber configuration.




MBE412

  • Capable of up to 4" or multi 2" wafer
  • 12 geometrically equivalent cell ports
  • Up to 8 Egun pockets
  • Manual or fully automated configuration
  • Easily expandable to multi chamber configuration.



MBE49

The Riber MBE 49 series of fully automated, silicon-style machines sets industry standards for material quality, yield, throughput, and costs associated with operation and maintenance.

Four reactors are available in the MBE 49 series, which are specifically designed for depositing arsenides, phosphides, nitrides and oxides. These industry-leading machines have a capacity of 4 x 4-inch wafers or 5 x 3-inch wafers and feature the capabilities for in-situ monitoring and pre-growth treatment.

MBE6000

The Riber MBE 6000 is a high-throughput, fully automated silicon-style machine that delivers industry-leading levels of reliability, yield, cost-effectiveness and reproducibility.
This system, which has a capacity of 9 x 4-inch wafers or 4 x 6-inch wafers.
The MBE 6000 has 13 source ports, a suite of in-situ characterization tools and a capability to load up to ten platens at one time.

MBE7000

The Riber MBE 7000 is the world's most advanced reactor. This silicon-style machine is the perfect choice for high-volume, cost-effective and reliable manufacture of gallium arsenide HBTs and pHEMTs wafers.
This system, which has a capacity of 14 x 4-inch wafers or 7 x 6-inch wafers.
The MBE 7000 has 13 source ports, a suite of in-situ characterization tools and a capability to load up to ten platens at one time.

Evaporation source

More than any other component, effusion cells and sources play a key role in the quality of materials grown by MBE (i.e. morphology, purity, composition, uniformity, etc.). With over 11.000 effusion cells and sources in the field, Riber has the largest installed base.

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Telephone contact: 81-3-3225-8073