
Product lineup
Failure and yield analysis / Ion Beam System

- Infinity FA system : Ion Beam Delayering
Ion Beam Delayering equipment is a cost-effective solution that provides rapid results for delamination and removal of material layers in semiconductor failure analysis. It provides excellent uniformity and minimal damage over large areas. Multiple ion beam etching techniques can be used to match etch rates of different materials in a single layer, ensuring uniform removal of the entire layer regardless of chemical composition.
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With 28 patents and proprietary technologies centered around ion energy and plasma control, Denton Vacuum is uniquely capable of helping semiconductor and nanotech companies meet their needs for low damage, contamination free, ultra thin and uniform films to keep them on their technology roadmaps.
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