
Providing real-time gas monitors for semiconductor and industrial process applications
Product lineup
・Real-Time Process Gas Monitor ASTON™ Impact
ASTON™ Impact is a mass spectrometer employing a quadrupole analyzer, ideal for process gas monitoring specialized in gas analysis. It offers high sensitivity and a compact footprint, enabling real-time monitoring of gases from atmospheric pressure to medium vacuum conditions.
Overvie of ATONARP

ATONARPJapan
ATONARP Corporation is a domestic manufacturer specializing in gas analysis, producing instruments including quadrupole mass spectrometers developed for real-time gas monitoring in semiconductor, industrial equipment, and pharmaceutical manufacturing processes. The Aston Series delivers rapid quantitative and qualitative gas analysis on-site at every manufacturing stage.Inquiry on the products
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