Agnitron Technology, Inc.
(Compound Semiconductor Equipment)
Product lineup
Agilis Metal Organic Chemical Vapor Deposition (MOCVD) system for research and development
MOCVD system with a highly scalable platform.
<Features >
- Single and dual chambers are available.
- Equipment for R&D and low volume production
- Selectable reactor type (Vertical Quartz tube reactor, Stainless steel Close Coupled Gas Injector (CCGI) reactor, Stainless steel Loadlocked reactor )
- Choice of cabinet modules
- Highly scalable platform
- Proprietary in-situ monitoring system (can be used with dual wavelength light sources)
- Easy-to-use, proprietary software
- Can be used to meet a variety of needs
Agilis Metal Organic Chemical Vapor Deposition (MOCVD) System for mass production
MOCVD system with high quality and high productivity.
<Features >
- A reactor design that minimizes turbulence during epitaxial growth and provides good uniformity
- Proprietary in-situ monitoring system (also compatible with dual wavelength light sources)
- Easy maintenance design.
- Easy-to-operate software developed by Agnitron.
- Highly reliable automatic transfer robot
- Glovebox, loading and anti-chamber
- Available for small growth chambers to large growth chambers
- High throughput
AGNITRON TECHNOLOGY is a U.S. manufacturer of MOCVD systems (Metal Organic Chemical Vapor Deposition) for compound semiconductor materials. AGNITRON TECHNOLOGY provides equipment for a wide range of materials, from research to mass production, including As/P, GaN, oxides (ZnO, Ga2O3, MgZnO, etc.), transition metal chalcogenides, and 2D materials. They offer a wide range of solutions, including proprietary control software, upgrades to in-situ monitoring, equipment modifications, maintenance for MOCVD equipment, and sales of maintenance consumable parts.
Inquiry on the products
Reception hours: Weekdays 9:00-17:30
(excluding Saturdays, Sundays, holidays, and company-designated holidays)