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PVA TePla AG / Germany

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PVA TePla AG

The TWIN-SC4 system is a fully-automatic implant monitoring system based on photo thermal measurement for accurate implant dose control and monitoring on product wafers. It has inline capability and its measurement principle is based on patented double modulation technique.

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Semiconductor Metrology Equipment

TWIN-SC4 is designed as a modular standalone system, which can be configured with handling modules and load ports for different wafer diameters and clean room concepts up to 300mm wafer size.
The SIRD (Scanning Infrared Depolarisation) tool is a non-contacting, non-destructive stress field imager for semiconductor wafers with inline capability. Rapid and precise stress field imaging is based on specially developed homodyne retarder techniques, patented by JenaWave. SIRD can be used as stand-alone tool for different wafer sizes, if manually loaded, or as a fully automated unit for 300mm wafer by adding a robot controlled handling attachment.

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Telephone contact: 81-3-3225-8073