Product lineup

Failure and yield analysis / Ion Beam System

Infinity FA system
  • Infinity FA system : Ion Beam Delayering

Ion Beam Delayering equipment is a cost-effective solution that provides rapid results for delamination and removal of material layers in semiconductor failure analysis. It provides excellent uniformity and minimal damage over large areas. Multiple ion beam etching techniques can be used to match etch rates of different materials in a single layer, ensuring uniform removal of the entire layer regardless of chemical composition.

Catalog/Brochure download

Overview of Denton Vacuum LLC
Denton Vacuum LLC
Denton Vacuum LLC U.S.A.

With 28 patents and proprietary technologies centered around ion energy and plasma control, Denton Vacuum is uniquely capable of helping semiconductor and nanotech companies meet their needs for low damage, contamination free, ultra thin and uniform films to keep them on their technology roadmaps.

Inquiry on the products

+81-3-3225-8073

Reception hours: Weekdays 9:00-17:30
(excluding Saturdays, Sundays, holidays, and company-designated holidays)