We
are
part
of
the
centrotherm
photovoltaics
group,
a
leading
global
technology
and
services
provider
for
the
manufacturing
of
solar
cells
and
solar
silicon.
We
supply
our
technologies
and
process
systems
to
major
semiconductor
manufacturers
and
leading
international
research
and
development
organizations
worldwide.
Product Lineup
High temperature annealing furnace "Activator150"
The centrotherm Activator 150 high temperature furnace line has been developed for post implantation annealing of Silicon Carbide (SiC) or Gallium Nitride (GaN) devices. The Activator 150 is available in various versions as R&D and serial production furnace and offers a high process flexibility. The unique design of the centrotherm metal-free heating allows process temperatures up to 1850 degC.
Vacuum Soldering System “VLO series”
Thanks to voidless and fluxless reflow soldering, our vacuum soldering systems offer ultra-clean solder joints for the following applications, among others: Power semiconductors, microelectronic hybrid modules, optoelectronic packaging, wafer level packaging, UHB-LED packaging, MEMS
High-temperature oxidation furnace “Oxidator150”
The Oxidator 150 is a high-temperature furnace, especially designed for the oxidation of silicon carbide (SiC) by centrotherm thermal solutions. Its capability to run high process temperatures of up to 1400°C and oxidation processes using O2, N2O, NO, NO2 or WetOx atmosphere makes for an excellent combination of flexibility and proven process quality. Equipped with metal-free heating and double vacuum, the Oxidator 150 is currently the safest ToxGas oxidation furnace on the market.
Vertical system for mass production “vericoo200”
Designed for high volume production with a maximum throughput rate and a high degree of flexibility, the verticoo 200 is suitable for all standard atmospheric and low pressure CVD processes. The single tube set-up with dual boat logistics is optimized for minimum handling time as well as low cost of ownership with low maintenance costs.