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07/09/2008

Exhibition Information of Exhibition Micromachine/MEMS

Place/Tokyo Big Sight WEST HALL1・2
Booth No/W1-078
Date/7/30-8/1
On Display
・Molecular Imprints/UV type Nano Imprinting System
・Vistec Lithography/Electron Beam Lithography System
・Raith/Electron Beam Lithography System
・NanoInk/Dip Pen Nanolithography System
・Hakuto/Ion Milling System
・KRI/End Hall Ion Source
・Plustek/CPI Etcher,
・J. P. Sercel Associates Inc. /Laser micro-processing system, Laser-Scribing-Diceing system, Thin Photo-Voltaic Scribing system
・SII Nano Technology/Focused Ion Beam System, Scanning Probe Microscope
・PVA TePla/MW Plasma System for MEMS
・Vistec Semiconductor System/Infrared Inspection Station (IRIS2000)